Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660650 | Selective aluminum plug formation and etchback process | Anthony Konecni, Qi-Zhong Hong | 2003-12-09 |
| 6641867 | Methods for chemical vapor deposition of tungsten on silicon or dielectric | Jiong-Ping Lu, August Fischer, Ming-Jang Hwang | 2003-11-04 |
| 6573167 | Using a carbon film as an etch hardmask for hard-to-etch materials | Guoqiang Xing, Changming Jin | 2003-06-03 |