Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Scott R. Summerfelt, Luigi Colombo, Sanjeev Aggarwal, Theodore S. Moise | 2003-10-21 |
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Andrew John McKerrow, Robert J. Kraft, Hyesook Hong | 2003-09-16 |
| 6605536 | Treatment of low-k dielectric films to enable patterning of deep submicron features | Mona Eissa, Kenneth D. Brennan, Hyesook Hong | 2003-08-12 |
| 6599829 | Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization | Patricia B. Smith, David B. Aldrich | 2003-07-29 |
| 6576922 | Ferroelectric capacitor plasma charging monitor | Shawming Ma, Stephen Roy Gilbert | 2003-06-10 |
| 6573167 | Using a carbon film as an etch hardmask for hard-to-etch materials | Wei-Yung Hsu, Changming Jin | 2003-06-03 |
| 6555431 | Method for forming integrated circuit capacitor and memory | Scott R. Summerfelt, Rajesh Khamankar | 2003-04-29 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Theodore S. Moise, Luigi Colombo, Tomoyuki Sakoda, Stephen Roy Gilbert +5 more | 2003-04-15 |
| 6534809 | Hardmask designs for dry etching FeRAM capacitor stacks | Theodore S. Moise, Stephen Roy Gilbert, Scott R. Summerfelt, Luigi Colombo | 2003-03-18 |