Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo, Theodore S. Moise | 2003-10-21 |
| 6635497 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Stephen Roy Gilbert, Scott R. Summerfelt | 2003-10-21 |
| 6617178 | Test system for ferroelectric materials and noble metal electrodes in semiconductor capacitors | Kaushal K. Singh | 2003-09-09 |
| 6610549 | Amorphous barrier layer in a ferroelectric memory cell | Ramamoorthy Ramesh | 2003-08-26 |
| 6596547 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Stephen Roy Gilbert, Scott R. Summerfelt | 2003-07-22 |
| 6576482 | One step deposition process for the top electrode and hardmask in a ferroelectric memory cell | Scott R. Summerfelt, Stevan G. Hunter | 2003-06-10 |
| 6528328 | Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing | Stephen Roy Gilbert, Scott R. Summerfelt | 2003-03-04 |
| 6528386 | Protection of tungsten alignment mark for FeRAM processing | Scott R. Summerfelt, Luigi Colombo, Stephen Roy Gilbert, Theodore S. Moise | 2003-03-04 |