Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635528 | Method of planarizing a conductive plug situated under a ferroelectric capacitor | Stephen Roy Gilbert, Scott R. Summerfelt | 2003-10-21 |
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Scott R. Summerfelt, Guoqiang Xing, Sanjeev Aggarwal, Theodore S. Moise | 2003-10-21 |
| 6600183 | Integrated circuit capacitor and memory | Mark Visokay, Rajesh Khamankar, Mark A. Kressley | 2003-07-29 |
| 6576546 | Method of enhancing adhesion of a conductive barrier layer to an underlying conductive plug and contact for ferroelectric applications | Stephen Roy Gilbert, Scott R. Summerfelt | 2003-06-10 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Theodore S. Moise, Guoqiang Xing, Tomoyuki Sakoda, Stephen Roy Gilbert +5 more | 2003-04-15 |
| 6544906 | Annealing of high-k dielectric materials | Antonio Luis Pacheco Rotondaro, Mark Visokay | 2003-04-08 |
| 6534809 | Hardmask designs for dry etching FeRAM capacitor stacks | Theodore S. Moise, Stephen Roy Gilbert, Scott R. Summerfelt, Guoqiang Xing | 2003-03-18 |
| 6528386 | Protection of tungsten alignment mark for FeRAM processing | Scott R. Summerfelt, Stephen Roy Gilbert, Theodore S. Moise, Sanjeev Aggarwal | 2003-03-04 |