Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667896 | Grouped plate line drive architecture and method | Juergen T. Rickes, Hugh P. McAdams, James W. Grace, Ralph H. Lanham | 2003-12-23 |
| 6660612 | Design to prevent tungsten oxidation at contact alignment in FeRAM | Yung Shan Chang, Theodore S. Moise | 2003-12-09 |
| 6656748 | FeRAM capacitor post stack etch clean/repair | Lindsey Hall | 2003-12-02 |
| 6635528 | Method of planarizing a conductive plug situated under a ferroelectric capacitor | Stephen Roy Gilbert, Luigi Colombo | 2003-10-21 |
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Guoqiang Xing, Luigi Colombo, Sanjeev Aggarwal, Theodore S. Moise | 2003-10-21 |
| 6635497 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Stephen Roy Gilbert | 2003-10-21 |
| 6596547 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Stephen Roy Gilbert | 2003-07-22 |
| 6593638 | Lightly donor doped electrodes for high-dielectric-constant materials | Howard R. Beratan, Bruce E. Gnade | 2003-07-15 |
| 6576482 | One step deposition process for the top electrode and hardmask in a ferroelectric memory cell | Sanjeev Aggarwal, Stevan G. Hunter | 2003-06-10 |
| 6576546 | Method of enhancing adhesion of a conductive barrier layer to an underlying conductive plug and contact for ferroelectric applications | Stephen Roy Gilbert, Luigi Colombo | 2003-06-10 |
| 6555431 | Method for forming integrated circuit capacitor and memory | Guoqiang Xing, Rajesh Khamankar | 2003-04-29 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Theodore S. Moise, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda, Stephen Roy Gilbert +5 more | 2003-04-15 |
| 6534809 | Hardmask designs for dry etching FeRAM capacitor stacks | Theodore S. Moise, Stephen Roy Gilbert, Guoqiang Xing, Luigi Colombo | 2003-03-18 |
| 6528328 | Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Stephen Roy Gilbert | 2003-03-04 |
| 6528386 | Protection of tungsten alignment mark for FeRAM processing | Luigi Colombo, Stephen Roy Gilbert, Theodore S. Moise, Sanjeev Aggarwal | 2003-03-04 |