Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635528 | Method of planarizing a conductive plug situated under a ferroelectric capacitor | Scott R. Summerfelt, Luigi Colombo | 2003-10-21 |
| 6635497 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Scott R. Summerfelt | 2003-10-21 |
| 6596547 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Scott R. Summerfelt | 2003-07-22 |
| 6576546 | Method of enhancing adhesion of a conductive barrier layer to an underlying conductive plug and contact for ferroelectric applications | Scott R. Summerfelt, Luigi Colombo | 2003-06-10 |
| 6576922 | Ferroelectric capacitor plasma charging monitor | Shawming Ma, Guoqiang Xing | 2003-06-10 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Theodore S. Moise, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda +5 more | 2003-04-15 |
| 6534809 | Hardmask designs for dry etching FeRAM capacitor stacks | Theodore S. Moise, Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo | 2003-03-18 |
| 6528386 | Protection of tungsten alignment mark for FeRAM processing | Scott R. Summerfelt, Luigi Colombo, Theodore S. Moise, Sanjeev Aggarwal | 2003-03-04 |
| 6528328 | Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing | Sanjeev Aggarwal, Scott R. Summerfelt | 2003-03-04 |