Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660612 | Design to prevent tungsten oxidation at contact alignment in FeRAM | Yung Shan Chang, Scott R. Summerfelt | 2003-12-09 |
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo, Sanjeev Aggarwal | 2003-10-21 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda, Stephen Roy Gilbert +5 more | 2003-04-15 |
| 6534809 | Hardmask designs for dry etching FeRAM capacitor stacks | Stephen Roy Gilbert, Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo | 2003-03-18 |
| 6534348 | Ultrascaled MIS transistors fabricated using silicon-on-lattice-matched insulator approach | Glen Wilk | 2003-03-18 |
| 6528386 | Protection of tungsten alignment mark for FeRAM processing | Scott R. Summerfelt, Luigi Colombo, Stephen Roy Gilbert, Sanjeev Aggarwal | 2003-03-04 |
| 6521042 | Semiconductor growth method | Francis G. Celii, Alan Katz, Yung-Chung Kao | 2003-02-18 |