Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613698 | Lower temperature method for forming high quality silicon-nitrogen dielectrics | John Mark Anthony, Yi Wei, Robert M. Wallace | 2003-09-02 |
| 6560377 | Non-hermetic packaging for lithium niobate-based devices | Christopher Jones | 2003-05-06 |
| 6552388 | Hafnium nitride gate dielectric | Robert M. Wallace | 2003-04-22 |
| 6544875 | Chemical vapor deposition of silicate high dielectric constant materials | — | 2003-04-08 |
| 6534348 | Ultrascaled MIS transistors fabricated using silicon-on-lattice-matched insulator approach | Theodore S. Moise | 2003-03-18 |