Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613698 | Lower temperature method for forming high quality silicon-nitrogen dielectrics | Glen Wilk, Yi Wei, Robert M. Wallace | 2003-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613698 | Lower temperature method for forming high quality silicon-nitrogen dielectrics | Glen Wilk, Yi Wei, Robert M. Wallace | 2003-09-02 |