Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624944 | Fluorinated coating for an optical element | Marvin W. Cowens, Steven A. Henck | 2003-09-23 |
| 6613698 | Lower temperature method for forming high quality silicon-nitrogen dielectrics | Glen Wilk, John Mark Anthony, Yi Wei | 2003-09-02 |
| 6552388 | Hafnium nitride gate dielectric | Glen Wilk | 2003-04-22 |