Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613666 | Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structures | — | 2003-09-02 |
| 6614051 | Device for monitoring substrate charging and method of fabricating same | — | 2003-09-02 |
| 6576922 | Ferroelectric capacitor plasma charging monitor | Guoqiang Xing, Stephen Roy Gilbert | 2003-06-10 |
| 6554954 | Conductive collar surrounding semiconductor workpiece in plasma chamber | Ralph Straube | 2003-04-29 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Theodore S. Moise, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda +5 more | 2003-04-15 |