Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Robert J. Kraft, Hyesook Hong | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Robert J. Kraft, Hyesook Hong | 2003-09-16 |