Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Andrew John McKerrow, Robert J. Kraft | 2003-09-16 |
| 6605536 | Treatment of low-k dielectric films to enable patterning of deep submicron features | Mona Eissa, Guoqiang Xing, Kenneth D. Brennan | 2003-08-12 |