Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624086 | Effective solution and process to wet-etch metal-alloy films in semiconductor processing | — | 2003-09-23 |
| 6605536 | Treatment of low-k dielectric films to enable patterning of deep submicron features | Guoqiang Xing, Kenneth D. Brennan, Hyesook Hong | 2003-08-12 |
| 6579798 | Processes for chemical-mechanical polishing of a semiconductor wafer | Basab Chatterjee, Chad Kaneshige, Vincent C. Korthuis, Barry Lanier, Satyavolu Papa Rao | 2003-06-17 |
| 6551943 | Wet clean of organic silicate glass films | Troy A. Yocum | 2003-04-22 |