Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Andrew John McKerrow, Hyesook Hong | 2003-09-16 |
| 6607985 | Gate stack and etch process | Scott H. Prengle | 2003-08-19 |