Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583053 | Use of a sacrificial layer to facilitate metallization for small features | Jiong-Ping Lu, David Permana | 2003-06-24 |
| 6573167 | Using a carbon film as an etch hardmask for hard-to-etch materials | Guoqiang Xing, Wei-Yung Hsu | 2003-06-03 |