Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641867 | Methods for chemical vapor deposition of tungsten on silicon or dielectric | Wei-Yung Hsu, August Fischer, Ming-Jang Hwang | 2003-11-04 |
| 6630394 | System for reducing silicon-consumption through selective deposition | Jin Zhao, Yuqing Xu | 2003-10-07 |
| 6624066 | Reliable interconnects with low via/contact resistance | Ching-Te Lin | 2003-09-23 |
| 6583053 | Use of a sacrificial layer to facilitate metallization for small features | Changming Jin, David Permana | 2003-06-24 |
| 6559050 | Process for high thermal stable contact formation in manufacturing sub-quarter-micron CMOS devices | William R. McKee, Ming-Jang Hwang, Dirk N. Anderson, Wei William Lee | 2003-05-06 |
| 6544886 | Process for isolating an exposed conducting surface | Qi-Zhong Hong, Duane E. Carter, Yung Liu | 2003-04-08 |