Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610189 | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature | Bo Zheng, Girish Dixit, Fusen Chen | 2003-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610189 | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature | Bo Zheng, Girish Dixit, Fusen Chen | 2003-08-26 |