Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603269 | Resonant chamber applicator for remote plasma source | Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603269 | Resonant chamber applicator for remote plasma source | Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |