Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6640151 | Multi-tool control system, method and medium | Howard Grunes | 2003-10-28 |
| 6585563 | In-situ monitoring of linear substrate polishing operations | Fred C. Redeker, Manoocher Birang, Shijian Li | 2003-07-01 |
| 6582282 | Chemical mechanical polishing with multiple polishing pads | — | 2003-06-24 |
| 6561884 | Web lift system for chemical mechanical planarization | John M. White, Phillip R. Sommer | 2003-05-13 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Steven M. Zuniga, Hung Chih Chen | 2003-02-11 |