Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663466 | Carrier head with a substrate detector | Ming-Kuei Tseng, Steven M. Zuniga | 2003-12-16 |
| 6652912 | Method and system for spraying a viscous material on a wafer | Ren-Jyh Leu, Kun-I Lee, Bao-Ru Young | 2003-11-25 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Steven M. Zuniga | 2003-06-10 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Sen-Hou Ko | 2003-04-01 |
| 6531374 | Overlay shift correction for the deposition of epitaxial silicon layer and post-epitaxial silicon layers in a semiconductor device | Kun-I Lee, Tai-Yuan Wu, Ren-Jyh Leu | 2003-03-11 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Steven M. Zuniga, Sasson Somekh | 2003-02-11 |
| 6514124 | Carrier head for chemical mechanical polishing a substrate | Steven M. Zuniga, Manoocher Birang | 2003-02-04 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2003-01-28 |