Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592438 | CMP platen with patterned surface | Robert D. Tolles, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |