Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592438 | CMP platen with patterned surface | Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Fred C. Redeker | 2003-07-15 |
| 6527624 | Carrier head for providing a polishing slurry | Robert D. Tolles | 2003-03-04 |