Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592438 | CMP platen with patterned surface | Robert D. Tolles, Steven T. Mear, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |
| 6558236 | Method and apparatus for chemical mechanical polishing | Timothy James Donohue, Declan Liam Brett, Winston Su | 2003-05-06 |