Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623341 | Substrate polishing apparatus | — | 2003-09-23 |
| 6607428 | Material for use in carrier and polishing pads | — | 2003-08-19 |
| 6592438 | CMP platen with patterned surface | Steven T. Mear, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |
| 6575825 | CMP polishing pad | Steven T. Mear, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Steven M. Zuniga, Charles C. Garretson | 2003-06-03 |
| 6533645 | Substrate polishing article | — | 2003-03-18 |
| 6527624 | Carrier head for providing a polishing slurry | Sidney P. Huey | 2003-03-04 |
| 6524164 | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus | — | 2003-02-25 |