Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Robert D. Tolles, Steven M. Zuniga | 2003-06-03 |
| 6551176 | Pad conditioning disk | — | 2003-04-22 |