Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669538 | Pad cleaning for a CMP system | Shijian Li, Ramin Emami, Shi-Ping Wang, Fred C. Redeker, Lizhong Sun +1 more | 2003-12-30 |
| 6656842 | Barrier layer buffing after Cu CMP | Shijian Li, Fred C. Redeker, Ramin Emami, John M. White | 2003-12-02 |
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Ilya Perlov, Eugene Gantvarg | 2003-11-18 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2003-04-01 |
| 6520847 | Polishing pad having a grooved pattern for use in chemical mechanical polishing | Thomas H. Osterheld | 2003-02-18 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Kapila Wijekoon | 2003-01-28 |
| 6506104 | Carrier head with a flexible membrane | Ilya Perlov, Eugene Gantvarg | 2003-01-14 |