Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Eugene Gantvarg, Sen-Hou Ko | 2003-11-18 |
| 6575737 | Method and apparatus for improved substrate handling | Alexey Goder, Evgueni Gantvarg, Howard Grunes | 2003-06-10 |
| 6532866 | Method and apparatus for orienting substrates | Eugene Gantvarg, Leonid M. Tertitski | 2003-03-18 |
| 6506104 | Carrier head with a flexible membrane | Eugene Gantvarg, Sen-Hou Ko | 2003-01-14 |