Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Ilya Perlov, Sen-Hou Ko | 2003-11-18 |
| 6532866 | Method and apparatus for orienting substrates | Ilya Perlov, Leonid M. Tertitski | 2003-03-18 |
| 6506104 | Carrier head with a flexible membrane | Ilya Perlov, Sen-Hou Ko | 2003-01-14 |