Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669538 | Pad cleaning for a CMP system | Shijian Li, Sen-Hou Ko, Shi-Ping Wang, Fred C. Redeker, Lizhong Sun +1 more | 2003-12-30 |
| 6656842 | Barrier layer buffing after Cu CMP | Shijian Li, Fred C. Redeker, Sen-Hou Ko, John M. White | 2003-12-02 |
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Andrew J. Nagengast, Douglas Orcutt Brown, Shi-Ping Wang +2 more | 2003-07-15 |