Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669538 | Pad cleaning for a CMP system | Shijian Li, Ramin Emami, Sen-Hou Ko, Fred C. Redeker, Lizhong Sun +1 more | 2003-12-30 |
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Ramin Emami, Andrew J. Nagengast, Douglas Orcutt Brown +2 more | 2003-07-15 |