Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638143 | Ion exchange materials for chemical mechanical polishing | Yuchun Wang, Stan Tsai, Rajeev Bajaj, Fred C. Redeker | 2003-10-28 |
| 6620027 | Method and apparatus for hard pad polishing | Ajoy Zutshi, Rajeev Bajaj, Fred C. Redeker, Yutao Ma | 2003-09-16 |
| 6572453 | Multi-fluid polishing process | Stan Tsai, Yuchun Wang, Doyle E. Bennett, Fred C. Redeker, Madhavi R. Chandrachood +1 more | 2003-06-03 |
| 6561873 | Method and apparatus for enhanced CMP using metals having reductive properties | Stan Tsai, Yuchun Wang, Rajeev Bajaj, Fred C. Redeker | 2003-05-13 |
| 6537144 | Method and apparatus for enhanced CMP using metals having reductive properties | Stan Tsai, Yuchun Wang, Rajeev Bajaj, Fred C. Redeker | 2003-03-25 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Sen-Hou Ko | 2003-01-28 |