Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663466 | Carrier head with a substrate detector | Hung Chih Chen, Steven M. Zuniga | 2003-12-16 |
| 6547641 | Carrier head with a substrate sensor | Steven M. Zuniga | 2003-04-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663466 | Carrier head with a substrate detector | Hung Chih Chen, Steven M. Zuniga | 2003-12-16 |
| 6547641 | Carrier head with a substrate sensor | Steven M. Zuniga | 2003-04-15 |