Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660610 | Devices having improved capacitance and methods of their fabrication | — | 2003-12-09 |
| 6645865 | Methods, apparatuses and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Pai-Hung Pan | 2003-11-11 |
| 6613675 | Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Pai-Hung Pan | 2003-09-02 |
| 6599836 | Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Scott Meikle | 2003-07-29 |
| 6573478 | Systems for performing thermal reflow operations under high gravity conditions | David L. Chapek | 2003-06-03 |
| 6558234 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Michael A. Walker | 2003-05-06 |
| 6552408 | Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Pai-Hung Pan | 2003-04-22 |
| 6544435 | Composition and method of formation and use therefor in chemical-mechanical polishing | Whonchee Lee | 2003-04-08 |
| 6540593 | Fixed abrasive polishing pad | Michael A. Walker | 2003-04-01 |
| 6532772 | Formation of planar dielectric layers using liquid interfaces | — | 2003-03-18 |
| 6527626 | Fixed abrasive polishing pad | Michael A. Walker | 2003-03-04 |
| 6521536 | Planarization process | — | 2003-02-18 |
| 6521534 | Treatment of exposed silicon and silicon dioxide surfaces | Michael A. Walker | 2003-02-18 |
| 6520841 | Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet | Manoocher Birang, Martin Scales | 2003-02-18 |
| 6517425 | Fixed abrasive polishing pad | Michael A. Walker | 2003-02-11 |