Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660180 | Compositions for etching silicon with high selectivity to oxides and methods of using same | Pai-Hung Pan, Terry L. Gilton | 2003-12-09 |
| 6632719 | Capacitor structures with recessed hemispherical grain silicon | Scott DeBoer | 2003-10-14 |
| 6605539 | Electro-mechanical polishing of platinum container structure | Scott Meikle | 2003-08-12 |
| 6544435 | Composition and method of formation and use therefor in chemical-mechanical polishing | Karl M. Robinson | 2003-04-08 |
| 6541390 | Method and composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2003-04-01 |
| 6533893 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | Gundu M. Sabde, James J. Hofmann, Michael J. Joslyn | 2003-03-18 |