Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645798 | Metal gate engineering for surface p-channel devices | — | 2003-11-11 |
| 6627389 | Photolithography method using an antireflective coating | — | 2003-09-30 |
| 6614085 | Antireflective coating layer | — | 2003-09-02 |
| 6596595 | Forming a conductive structure in a semiconductor device | Ronald A. Weimer, Pai-Hung Pan, Deepa Ratakonda, James A. Beck, Randhir P. S. Thakur | 2003-07-22 |
| 6592777 | Manufacture and cleaning of a semiconductor | Gary Chen, Li Li | 2003-07-15 |
| 6593616 | Buried bit line memory circuitry | Pai-Hung Pan, Scott DeBoer | 2003-07-15 |
| 6593234 | Methods of utilizing metal rich silicide in forming semiconductor constructions | — | 2003-07-15 |
| 6583038 | Polycide structure and method for forming polycide structure | — | 2003-06-24 |
| 6559053 | Method of passivating an oxide surface subjected to a conductive material anneal | Zhongze Wang, Li Li | 2003-05-06 |
| 6555455 | Methods of passivating an oxide surface subjected to a conductive material anneal | Zhongze Wang, Li Li | 2003-04-29 |
| 6541390 | Method and composition for selectively etching against cobalt silicide | Whonchee Lee | 2003-04-01 |
| 6525384 | Conductor layer nitridation | Randhir P. S. Thakur, Scott DeBoer | 2003-02-25 |
| 6524953 | Asymmetric, double-sided self-aligned silicide and method of forming the same | — | 2003-02-25 |
| 6524951 | Method of forming a silicide interconnect over a silicon comprising substrate and method of forming a stack of refractory metal nitride over refractory metal silicide over silicon | — | 2003-02-25 |
| 6509239 | Method of fabricating a field effect transistor | Michael Nuttall, Er-Xuan Ping | 2003-01-21 |