Issued Patents 2003
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664198 | Method of forming a silicon nitride dielectric layer | Fernando Gonzalez, John H. Zhang | 2003-12-16 |
| 6613628 | Method and structure for reducing leakage current in capacitors | Lingyi A. Zheng | 2003-09-02 |
| 6608342 | Container capacitor structure and method of formation thereof | D. Mark Durcan, Trung T. Doan, Roger Lee, Fernando Gonzalez | 2003-08-19 |
| 6607965 | Methods of forming capacitors | Behnam Moradi, Lingyi A. Zheng, John Packard | 2003-08-19 |
| 6600207 | Structure to reduce line-line capacitance with low K material | Ying Huang | 2003-07-29 |
| 6583441 | Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer | Behnam Moradi, Lingyi A. Zheng, John Packard | 2003-06-24 |
| 6583006 | Method to reduce floating grain defects in dual-sided container capacitor fabrication | — | 2003-06-24 |
| 6562684 | Methods of forming dielectric materials | Behnam Moradi, Lingyi A. Zheng, John Packard | 2003-05-13 |
| 6551893 | Atomic layer deposition of capacitor dielectric | Lingyi A. Zheng, Lyle Breiner, Trung T. Doan | 2003-04-22 |
| 6538274 | Reduction of damage in semiconductor container capacitors | Lingyi A. Zheng | 2003-03-25 |
| 6531407 | Method, structure and process flow to reduce line-line capacitance with low-K material | Ying Huang | 2003-03-11 |
| 6518611 | Capacitor array structure for semiconductor devices | — | 2003-02-11 |
| 6518117 | Methods of forming nitrogen-containing masses, silicon nitride layers, and capacitor constructions | Zhiping Yin | 2003-02-11 |
| 6511892 | Diffusion-enhanced crystallization of amorphous materials to improve surface roughness | Randhir P. S. Thakur | 2003-01-28 |
| 6509239 | Method of fabricating a field effect transistor | Michael Nuttall, Yongjun Jeff Hu | 2003-01-21 |
| 6509227 | Formation of conductive rugged silicon | Randhir P. S. Thakur | 2003-01-21 |