Issued Patents 2003
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663470 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Scott E. Moore | 2003-12-16 |
| 6661051 | Container capacitor structure and method of formation thereof | D. Mark Durcan, Roger Lee, Fernando Gonzalez | 2003-12-09 |
| 6653220 | Advance metallization process | Manny K. F. Ma, Jeff Zhiqiang Wu | 2003-11-25 |
| 6653154 | Method of forming self-aligned, trenchless mangetoresistive random-access memory (MRAM) structure with sidewall containment of MRAM structure | Roger Lee, Dennis Keller, Gurtej S. Sandhu, Ren Earl | 2003-11-25 |
| 6645844 | Methods for high density direct connect LOC assembly | — | 2003-11-11 |
| 6632736 | Method of forming low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer | Gurtej S. Sandhu, Tyler Lowrey | 2003-10-14 |
| 6628410 | Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers and other microelectronic substrates | — | 2003-09-30 |
| 6624517 | Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer | Gurtej S. Sandhu, Tyler Lowrey | 2003-09-23 |
| 6620680 | Method of forming a contact structure and a container capacitor structure | D. Mark Durcan, Roger Lee, Fernando Gonzalez | 2003-09-16 |
| 6613702 | Methods of forming capacitor constructions | Gurtej S. Sandhu | 2003-09-02 |
| 6608342 | Container capacitor structure and method of formation thereof | D. Mark Durcan, Roger Lee, Fernando Gonzalez, Er-Xuan Ping | 2003-08-19 |
| 6602380 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Scott E. Moore | 2003-08-05 |
| 6585575 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Scott E. Moore | 2003-07-01 |
| 6582281 | Semiconductor processing methods of removing conductive material | Scott Meikle | 2003-06-24 |
| 6583028 | Methods of forming trench isolation regions | Gurtej S. Sandhu | 2003-06-24 |
| 6573601 | Integrated circuit contact | Charles H. Dennison | 2003-06-03 |
| 6573199 | Methods of treating dielectric materials with oxygen, and methods of forming capacitor constructions | Gurtej S. Sandhu | 2003-06-03 |
| 6559054 | Methods of treating surfaces of substrates | Scott E. Moore | 2003-05-06 |
| 6551893 | Atomic layer deposition of capacitor dielectric | Lingyi A. Zheng, Er-Xuan Ping, Lyle Breiner | 2003-04-22 |
| 6541353 | Atomic layer doping apparatus and method | Gurtej S. Sandhu | 2003-04-01 |
| 6537915 | Methods of treating surfaces of substrates | Scott E. Moore | 2003-03-25 |
| 6531352 | Methods of forming conductive interconnects | Gurtej S. Sandhu, Howard E. Rhodes, Sujit Sharan, Philip J. Ireland, Martin C. Roberts | 2003-03-11 |
| 6531761 | High density direct connect LOC assembly | — | 2003-03-11 |
| 6531401 | Method of cleaning a substrate surface using a frozen material | Scott E. Moore | 2003-03-11 |
| 6528834 | Container capacitor structure and method of formation thereof | D. Mark Durcan, Roger Lee, Fernando Gonzalez | 2003-03-04 |