Issued Patents 2003
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663470 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-12-16 |
| 6652370 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-11-25 |
| 6642140 | System for filling openings in semiconductor products | — | 2003-11-04 |
| 6626734 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-09-30 |
| 6623329 | Method and apparatus for supporting a microelectronic substrate relative to a planarization pad | — | 2003-09-23 |
| 6612900 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-09-02 |
| 6613105 | System for filling openings in semiconductor products | — | 2003-09-02 |
| 6612328 | In-line valve | — | 2003-09-02 |
| 6609947 | Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of micro electronic substrates | — | 2003-08-26 |
| 6602380 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-08-05 |
| 6585575 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-07-01 |
| 6572440 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2003-06-03 |
| 6559054 | Methods of treating surfaces of substrates | Trung T. Doan | 2003-05-06 |
| 6547639 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-04-15 |
| 6544109 | Slurry delivery and planarization systems | — | 2003-04-08 |
| 6540588 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-04-01 |
| 6537190 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-03-25 |
| 6537915 | Methods of treating surfaces of substrates | Trung T. Doan | 2003-03-25 |
| 6531401 | Method of cleaning a substrate surface using a frozen material | Trung T. Doan | 2003-03-11 |
| 6514125 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-02-04 |
| 6514130 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-02-04 |
| 6506101 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-01-14 |