Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653234 | Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants | Ravi Iyer | 2003-11-25 |
| 6642620 | Integrated circuits having low resistivity contacts and the formation thereof using an in situ plasma doping and clean | Gurtej S. Sandhu | 2003-11-04 |
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Neal R. Rueger, Allen Mardian | 2003-09-30 |
| 6602785 | Method of forming a conductive contact on a substrate and method of processing a semiconductor substrate using an ozone treatment | Gurtej S. Sandhu, Terry L. Gilton | 2003-08-05 |
| 6597042 | Contact with germanium layer | Jeffrey W. Honeycutt | 2003-07-22 |
| 6554910 | Method for treating residues in semiconductor processing chambers | Gurtej S. Sandhu | 2003-04-29 |
| 6533894 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Gurtej S. Sandhu, Paul Smith, Mei Chang | 2003-03-18 |
| 6531352 | Methods of forming conductive interconnects | Gurtej S. Sandhu, Trung T. Doan, Howard E. Rhodes, Philip J. Ireland, Martin C. Roberts | 2003-03-11 |
| 6524975 | Combined gate cap or digit line and spacer deposition using HDP | Weimin Li, Gurtej S. Sandhu | 2003-02-25 |