Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Neal R. Rueger | 2003-09-30 |
| 6620253 | Engagement mechanism for semiconductor substrate deposition process kit hardware | Ross S. Dando, Craig M. Carpenter, Philip Campbell, Gurtej S. Sandhu | 2003-09-16 |
| 6613587 | Method of replacing at least a portion of a semiconductor substrate deposition chamber liner | Craig M. Carpenter, Ross S. Dando, Philip Campbell, Gurtej S. Sandhu | 2003-09-02 |