Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660657 | Methods of incorporating nitrogen into silicon-oxide-containing layers | Gurtej S. Sandhu, John T. Moore | 2003-12-09 |
| 6660658 | Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors | Gurtej S. Sandhu, John T. Moore | 2003-12-09 |
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Allen Mardian | 2003-09-30 |
| 6606802 | Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas | Gurtej S. Sandhu, Michael Li | 2003-08-19 |
| 6589611 | Deposition and chamber treatment methods | Weimin Li | 2003-07-08 |