Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613656 | Sequential pulse deposition | — | 2003-09-02 |
| 6596583 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Vishnu K. Agarwal, Garo Derderian, Gurtej S. Sandhu, Mark Visokay, Cem Basceri +1 more | 2003-07-22 |
| 6589611 | Deposition and chamber treatment methods | Neal R. Rueger | 2003-07-08 |
| 6576538 | Technique for high efficiency metalorganic chemical vapor deposition | Sam Yang | 2003-06-10 |
| 6573571 | Semiconductor structure including metal nitride and metal silicide layers over active area and gate stack | — | 2003-06-03 |
| 6539341 | Method and apparatus for log information management and reporting | Sajid Hussain, Andrew Nakao, Vikas Khandelwal | 2003-03-25 |
| 6524975 | Combined gate cap or digit line and spacer deposition using HDP | Sujit Sharan, Gurtej S. Sandhu | 2003-02-25 |
| 6515363 | In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications | — | 2003-02-04 |
| 6503822 | Methods for insitu plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications | — | 2003-01-07 |