Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649466 | Method of forming DRAM circuitry | Cem Basceri, M. Visokay, J. Drynan, Gurtej S. Sandhu | 2003-11-18 |
| 6627260 | Deposition methods | Gurtej S. Sandhu | 2003-09-30 |
| 6617250 | Methods of depositing a layer comprising tungsten and methods of forming a transistor gate line | Cem Basceri, Mark Visokay, John M. Drynan, Gurtej S. Sandhu | 2003-09-09 |
| 6608343 | Rough (high surface area) electrode from Ti and TiN, capacitors and semiconductor devices including same | Gurtej S. Sandhu | 2003-08-19 |
| 6602796 | Chemical vapor deposition for smooth metal films | Gurtej S. Sandhu | 2003-08-05 |
| 6596636 | ALD method to improve surface coverage | Gurtej S. Sandhu | 2003-07-22 |
| 6596583 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Vishnu K. Agarwal, Gurtej S. Sandhu, Weimin Li, Mark Visokay, Cem Basceri +1 more | 2003-07-22 |
| 6559472 | Film composition | Gurtej S. Sandhu | 2003-05-06 |
| 6511896 | Method of etching a substantially amorphous TA2O5 comprising layer | Cem Basceri, Mark Visokay, John M. Drynan, Gurtej S. Sandhu | 2003-01-28 |