Issued Patents 2003
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670238 | Method and structure for reducing contact aspect ratios | Scott DeBoer | 2003-12-30 |
| 6670256 | Metal oxynitride capacitor barrier layer | Sam Yang | 2003-12-30 |
| 6667502 | Structurally-stabilized capacitors and method of making of same | Gurtej S. Sandhu | 2003-12-23 |
| 6664583 | Metal oxynitride capacitor barrier layer | Sam Yang | 2003-12-16 |
| 6649545 | Photo-assisted remote plasma apparatus and method | — | 2003-11-18 |
| 6638809 | Methods of forming semiconductor circuit constructions and capacitor constructions | — | 2003-10-28 |
| 6635939 | Boron incorporated diffusion barrier material | Gurtej S. Sandhu | 2003-10-21 |
| 6631069 | Metal oxynitride capacitor barrier layer | Sam Yang | 2003-10-07 |
| 6630391 | Boron incorporated diffusion barrier material | Gurtej S. Sandhu | 2003-10-07 |
| 6612901 | Apparatus for in-situ optical endpointing of web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2003-09-02 |
| 6607975 | Device and method for protecting against oxidation of a conductive layer in said device | — | 2003-08-19 |
| 6596583 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Garo Derderian, Gurtej S. Sandhu, Weimin Li, Mark Visokay, Cem Basceri +1 more | 2003-07-22 |
| 6590246 | Structures and methods for improved capacitor cells in integrated circuits | — | 2003-07-08 |
| 6580115 | Capacitor electrode for integrating high k materials | — | 2003-06-17 |
| 6576564 | Photo-assisted remote plasma apparatus and method | — | 2003-06-10 |
| 6570204 | Integrated circuitry and DRAM circuitry | — | 2003-05-27 |
| 6566701 | Encapsulated conductive pillar | — | 2003-05-20 |
| 6562182 | Method and apparatus for endpointing a chemical-mechanical planarization process | — | 2003-05-13 |
| 6555863 | Semiconductor circuit constructions, capacitor constructions, and methods of forming semiconductor circuit constructions and capacitor constructions | — | 2003-04-29 |
| 6537912 | Method of forming an encapsulated conductive pillar | — | 2003-03-25 |
| 6524751 | Reticle design for alternating phase shift mask | William A. Stanton | 2003-02-25 |
| 6521544 | Method of forming an ultra thin dielectric film | Garry Mercaldi | 2003-02-18 |
| 6517668 | Method and apparatus for endpointing a chemical-mechanical planarization process | — | 2003-02-11 |
| 6511900 | Boron incorporated diffusion barrier material | Gurtej S. Sandhu | 2003-01-28 |