Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670256 | Metal oxynitride capacitor barrier layer | Vishnu K. Agarwal | 2003-12-30 |
| 6664584 | Metal oxynitride capacitor barrier layer | Vishnu Kumar Agrawal | 2003-12-16 |
| 6664583 | Metal oxynitride capacitor barrier layer | Vishnu K. Agarwal | 2003-12-16 |
| 6631069 | Metal oxynitride capacitor barrier layer | Vishnu K. Agarwal | 2003-10-07 |
| 6617248 | Method for forming a ruthenium metal layer | — | 2003-09-09 |
| 6596583 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Vishnu K. Agarwal, Garo Derderian, Gurtej S. Sandhu, Weimin Li, Mark Visokay +1 more | 2003-07-22 |
| 6586796 | Capacitor with high dielectric constant materials | Cem Basceri, Gurtej S. Sandhu | 2003-07-01 |
| 6576538 | Technique for high efficiency metalorganic chemical vapor deposition | Weimin Li | 2003-06-10 |
| 6524912 | Planarization of metal container structures | John M. Drynan | 2003-02-25 |