Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606802 | Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas | Gurtej S. Sandhu, Neal R. Rueger | 2003-08-19 |
ML
Michael Li
Overall (2003): #156,288 of 273,478Top 60%
1
Patents 2003