Issued Patents 2003
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670288 | Methods of forming a layer of silicon nitride in a semiconductor fabrication process | Scott DeBoer, Mark Fischer, Randhir P. S. Thakur | 2003-12-30 |
| 6660658 | Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors | Gurtej S. Sandhu, Neal R. Rueger | 2003-12-09 |
| 6660657 | Methods of incorporating nitrogen into silicon-oxide-containing layers | Gurtej S. Sandhu, Neal R. Rueger | 2003-12-09 |
| 6653184 | Method of forming transistors associated with semiconductor substrates comprising forming a nitrogen-comprising region across an oxide region of a transistor gate | — | 2003-11-25 |
| 6649543 | Methods of forming silicon nitride, methods of forming transistor devices, and transistor devices | — | 2003-11-18 |
| 6638820 | Method of forming chalcogenide comprising devices, method of precluding diffusion of a metal into adjacent chalcogenide material, and chalcogenide comprising devices | — | 2003-10-28 |
| 6639243 | DRAM cell constructions | Fernando Gonzalez, Kevin L. Beaman, Ron Weimer | 2003-10-28 |
| 6635530 | Methods of forming gated semiconductor assemblies | Mark A. Helm, Mark Fischer, Scott DeBoer | 2003-10-21 |
| 6624088 | Method of forming low dielectric silicon oxynitride spacer films highly selective to etchants | — | 2003-09-23 |
| 6548405 | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride | Brenda D. Kraus, Scott DeBoer | 2003-04-15 |
| 6528396 | Transistor and method of making the same | — | 2003-03-04 |
| 6518626 | Method of forming low dielectric silicon oxynitride spacer films highly selective of etchants | — | 2003-02-11 |
| 6515350 | Protective conformal silicon nitride films and spacers | — | 2003-02-04 |