Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617634 | RuSixOy-containing adhesion layers and process for fabricating the same | Eugene P. Marsh | 2003-09-09 |
| 6610568 | Process for fabricating RuSixOy-containing adhesion layers | Eugene P. Marsh | 2003-08-26 |
| 6548405 | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride | John T. Moore, Scott DeBoer | 2003-04-15 |