Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660631 | Devices containing platinum-iridium films and methods of preparing such films and devices | — | 2003-12-09 |
| 6656835 | Process for low temperature atomic layer deposition of Rh | Stefan Uhlenbrock | 2003-12-02 |
| 6642567 | Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices | — | 2003-11-04 |
| 6626999 | Vapor forming devices | — | 2003-09-30 |
| 6617634 | RuSixOy-containing adhesion layers and process for fabricating the same | Brenda D. Kraus | 2003-09-09 |
| 6610568 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2003-08-26 |
| 6583022 | Methods of forming roughened layers of platinum and methods of forming capacitors | — | 2003-06-24 |
| 6569689 | Method of forming a capacitor | — | 2003-05-27 |
| 6541067 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same | Stefan Uhlenbrock | 2003-04-01 |
| 6528786 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2003-03-04 |
| 6517616 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Stefan Uhlenbrock | 2003-02-11 |
| 6506666 | Method of fabricating an SrRuO3 film | — | 2003-01-14 |